TY  - GEN
AU  - Mahan, John E
TI  - Physical vapor deposition of thin films
SN  - 0471330019
AV  - TS695 .M33 2000
PY  - 2000///
CY  - New York
PB  - John Wiley & Sons
KW  - Vapor-plating
KW  - Thin films
N1  - "A Wiley-interscience publication."; Includes bibliographical references and index
ER  -